We developed a nonlocal metalens operating in DUV for focusing the chiral DUV-THG using the same chiral BIC cavity and phase-gradient approach.  Our platform creates efficient, ultracompact, and multifunctional integrated devices for future integrated DUV nanophotonics devices in MedTech, imaging, and advanced manufacturing.

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DUV coherent light sources are critical for various applications such as nanolithography, biomedical imaging, and spectroscopy. We designed, nanofabricated, and measured tunable DUV light sources, with strong coherent properties, and the possibility to control chirality of the emitted light using high Q-factor metasurfaces supporting bound states in the continuum.

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